{"id":233322,"date":"2024-10-19T15:12:24","date_gmt":"2024-10-19T15:12:24","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-en-62047-112013\/"},"modified":"2024-10-25T09:41:45","modified_gmt":"2024-10-25T09:41:45","slug":"bs-en-62047-112013","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-en-62047-112013\/","title":{"rendered":"BS EN 62047-11:2013"},"content":{"rendered":"

IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material’s melting temperature.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
6<\/td>\nEnglish
CONTENTS <\/td>\n<\/tr>\n
7<\/td>\n1 Scope
2 Normative References
3 Symbols and designations
Tables
Table 1 \u2013 Symbols and designations <\/td>\n<\/tr>\n
8<\/td>\n4 Test piece
4.1 General
4.2 Shape of test piece
4.3 Test piece thickness
Figures
Figure 1 \u2013 Thin film test piece <\/td>\n<\/tr>\n
9<\/td>\n4.4 In-plane type test piece
4.5 Out-of-plane type test piece
5 Testing method and test apparatus
5.1 Measurement principle
5.1.1 General <\/td>\n<\/tr>\n
10<\/td>\n5.1.2 In-plane method
5.1.3 Out-of-plane method
Figure 2 \u2013 CLTE measurement principles <\/td>\n<\/tr>\n
11<\/td>\n5.2 Test apparatus
5.2.1 General
5.2.2 In-plane method
5.2.3 Out-of-plane method
5.3 Temperature measurement
5.4 In-plane test piece handling <\/td>\n<\/tr>\n
12<\/td>\n5.5 Thermal strain measurement
5.6 Heating speed
5.7 Data analysis
5.7.1 General
5.7.2 Terminal-based calculation
5.7.3 Slope calculation by linear least squares method
6 Test report <\/td>\n<\/tr>\n
14<\/td>\nAnnex A (informative) Test piece fabrication
Figure A.1 \u2013 Schematic test piece fabrication process <\/td>\n<\/tr>\n
15<\/td>\nAnnex B (informative) Test piece handling example
Figure B.1 \u2013 Auxiliary jigs and a specimen example <\/td>\n<\/tr>\n
16<\/td>\nAnnex C (informative) Test piece releasing process
Figure C.1 \u2013 Schematic illustration showing the test piece releasing process <\/td>\n<\/tr>\n
17<\/td>\nAnnex D (informative) Out-of-plane test setup and test piece example
Figure D.1 \u2013 Example of test setup and test piece <\/td>\n<\/tr>\n
18<\/td>\nAnnex E (informative) Data analysis example in in-plane test method
Figure E.1 \u2013 Example of CLTE measurement with an aluminium test piece <\/td>\n<\/tr>\n
19<\/td>\nAnnex F (informative) Data analysis example in out-of-plane test method <\/td>\n<\/tr>\n
20<\/td>\nFigure F.1 \u2013 Example of CLTE measurement with a gold test piece <\/td>\n<\/tr>\n
21<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Semiconductor devices. Micro-electromechanical devices – Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2013<\/td>\n24<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":233325,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[577,2641],"product_tag":[],"class_list":{"0":"post-233322","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-31-080-99","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/233322","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/233325"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=233322"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=233322"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=233322"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}